Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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===ChipPlace | ===ChipPlace=== | ||
A pattern can easily be set up for a dose test using the ChipPlace module. In ChipPlace one can set up a pattern to be instanced a number of time and easily assign each instance a dose. The dose can be manually set or be linearly interpolated between a start and end value for the instanced array. The output of ChipPlace is a single pattern file with all array elements assigned to individual doses (shot ranks). This also works with patterns that already have PEC applied. In that case ChipPlace will create a combined modulation of the PEC modulation and the dose test modulation. In the example below we demonstrate how to set up dose test without PEC. If PEC is needed a PEC node can simply be added before the ChipPlace node. In the example we will use the '''Array_dots''' pattern found in the examples pane. It is a simple array of dots in a 100 x 100 µm<sup>2</sup> box. The procedure is | A pattern can easily be set up for a dose test using the ChipPlace module. In ChipPlace one can set up a pattern to be instanced a number of time and easily assign each instance a dose. The dose can be manually set or be linearly interpolated between a start and end value for the instanced array. The output of ChipPlace is a single pattern file with all array elements assigned to individual doses (shot ranks). This also works with patterns that already have PEC applied. In that case ChipPlace will create a combined modulation of the PEC modulation and the dose test modulation. In the example below we demonstrate how to set up dose test without PEC. If PEC is needed a PEC node can simply be added before the ChipPlace node. In the example we will use the '''Array_dots''' pattern found in the examples pane. It is a simple array of dots in a 100 x 100 µm<sup>2</sup> box. The procedure is | ||