Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. The options available are: | The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. The options available are: | ||
'''Import Zero Width Paths:''' Allows polygonal paths to be imported with a width. | '''Import Zero Width Paths:''' Allows polygonal paths to be imported with a defined width, i.e. convert a 1D wire to a 2D structure. | ||
'''Keep Path Elements:''' If checked, polygonal paths will be perserved in addition to the 2D structure. | |||
'''Import Boxes:''' | |||