Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
Appearance
| Line 24: | Line 24: | ||
|- | |- | ||
| Transform || x | | Transform || x | ||
| - | |- | ||
| Bias || x | | Bias || x | ||
| - | |- | ||
| AND, OR, MINUS, XOR, P-XOR, NOT || x | | AND, OR, MINUS, XOR, P-XOR, NOT || x | ||
| - | |- | ||
| Extract || x | | Extract || x | ||
| - | |- | ||
| Replace || | | Replace || | ||
| - | |- | ||
| Merge || | | Merge || | ||
| - | |- | ||
| Grid || | | Grid || | ||
| - | |- | ||
| Mapping || | | Mapping || | ||
| - | |- | ||
| Filter || | | Filter || | ||
| - | |- | ||
| Fracture || | | Fracture || | ||
| - | |- | ||
| ChipPlace || Graphical interface to set up arrays of patterns and assign dose to each element, excellent for dose testing | | ChipPlace || Graphical interface to set up arrays of patterns and assign dose to each element, excellent for dose testing | ||
|- | |- | ||
| Visual-Job || | | Visual-Job || | ||
| - | |- | ||
| PEC || Used to apply Proximity Effect Correction to a pattern | | PEC || Used to apply Proximity Effect Correction to a pattern | ||
|- | |- | ||