Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
Appearance
| Line 7: | Line 7: | ||
==Node descriptions== | ==Node descriptions== | ||
The main nodes of Beamer and their primary use are listed in the table below. Further details of each node are also provided below. | |||
{| class="wikitable" | {| class="wikitable" | ||
| Line 27: | Line 29: | ||
| Example || Example | | Example || Example | ||
|} | |} | ||
==Node setups== | |||
==Node setups== | ==Node setups== | ||