Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
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=Sample mounting= | =Job execution= | ||
The following sections describe how a substrate is mounted, transfered to the system and exposed. | |||
==Sample mounting== | |||
The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/Cassettes|JEOL 9500 cassette specifications page.]] As an example the 4" titanium cassette is shown below. | The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/Cassettes|JEOL 9500 cassette specifications page.]] As an example the 4" titanium cassette is shown below. | ||