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| Line 136: |
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| *Any standard cleanroom material | | *Any standard cleanroom material |
| |- | | |- |
| |}
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|
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| ==Quality control of length measurement ==
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality Control (QC) for SEM Supra 3'''
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| |-
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| |
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| *[http://labmanager.dtu.dk/d4Show.php?id=4745&mach=361 QC procedure for SEM Supra 3]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=361 Newest QC data for SEM Supra 3]<br>
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|
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| '''QC limits:'''
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| {| {{table}}
| |
| | align="center" valign="top"|
| |
| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
| |
|
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| ! Detector
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| ! Settings
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| ! Magnification
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| ! Measured dimensions
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| ! Calibration limit
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| ! Action limit
| |
| |-
| |
| |SE2
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| | EHT 10 kV,
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| WD 10 mm
| |
| | 2.440 k
| |
| (mag range 1)
| |
| | 70x70 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
|
| |
| |-
| |
| |SE2
| |
| | EHT 10 kV,
| |
| WD 10 mm
| |
| | 17.000 k
| |
| (mag range 2)
| |
| | 10x10 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| |SE2
| |
| | EHT 5 kV,
| |
| WD 5 mm
| |
| | 17.000 k
| |
| | 10x10 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| |InLens
| |
| | EHT 2 kV,
| |
| WD minimum
| |
| | 17.000 k
| |
| | 10x10 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| |HDAsB (Compo)
| |
| | EHT 10 kV,
| |
| WD 5 mm
| |
| | 17.000 k
| |
| | 10x10 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| | VPSE
| |
| | EHT 10 kV,
| |
| WD 10 mm,
| |
| 17 Pa
| |
| | 17.000 k
| |
| | 10x10 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| | InLens
| |
| | EHT 5 kV,
| |
| WD 5 mm
| |
| | 200.000 k
| |
| (mag range 3)
| |
| | 1x1 μm
| |
| | ± 2 %
| |
| | ± 3 %
| |
| |-
| |
|
| |
| | InLens
| |
| | EHT 10 kV,
| |
| WD 3 mm
| |
| | 1.000.000 k
| |
| | (imaging only)
| |
| | NA
| |
| | NA
| |
| |-
| |
|
| |
| |}
| |
| |-
| |
| |}
| |
| |} | | |} |
