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=SEM Supra 3=
=SEM Gemini 1=


The SEM Supra 3 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
The SEM Gemini 1 is a scanning electron microscope (SEM). It is a Zeiss GeminiSEM 560 .


The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.
The SEM produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.


This SEM is equipped with a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.
The SEM is equipped with six different detectors:
* SE2: Chamber mounted secondary electron (SE) detector
* Inlens SE: In-column high resolution SE detector
* In-lens EsB: In-column highly sensitive backscatter electron (BSE) detector for obtaining good material contrast
* aBSD: Retractable column mounted solid state BSE detector with six sectors for detection of energy and angle selective backscattered electrons, i.e. for obtaining both material and topographical contrast
* VPSE: Variable pressure (VP) light detector for SE signal detecting
* aSTEM: Retractable solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging


The SEM Supra 3 is located in the cleanroom. It was installed in September 2015.
The SEM is a VP (variable pressure) instrument, indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. It has two different VP modes: A standard VP mode like the SEM Supra 1, 2 and 3 and a NanoVP mode. In the standard VP mode, the pressure in the chamber is increased as described above, and the dedicated VPSE detectors or the aBSED detector is used to image charging samples. In Nano VP mode, an retractable beam sleeve aperture is mounted on the column, which makes is possible to use the Inlens SE and the Inlens BSE detectors to obtains high resolution images of non-conducting samples. The SE2 and sSTEM detectors will not work in VP mode.
 
The SEM Gemini 1 is located in the cleanroom. It is being installed and tested in August-September 2023.




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