Specific Process Knowledge/Characterization/SEM Gemini 1: Difference between revisions
No edit summary |
No edit summary |
||
| Line 13: | Line 13: | ||
Right now, we are installing a new field emission scanning electron microscope (FE-SEM) in the B-section of the cleanroom. It is a state-of-the-art GeminiSEM 560 with the new Gemini 3 column from Carl Zeiss. | Right now, we are installing a new field emission scanning electron microscope (FE-SEM) in the B-section of the cleanroom. It is a state-of-the-art GeminiSEM 560 with the new Gemini 3 column from Carl Zeiss. | ||
The tool is next-generation compared to our present three about 10 years old Supra-40/60 SEM’s (also from Carl Zeiss). We are looking forward to offer our users access to all the new features provided by this tool, a.o.: | The tool is next-generation compared to our present three about 10 years old Supra-40/60 SEM’s (also from Carl Zeiss). We are looking forward to offer our users access to all the new features provided by this tool, a.o.: | ||
<b>Detectors:</b> | <b>Detectors:</b> | ||
| Line 21: | Line 22: | ||
* VPSE: Variable pressure (VP) light detector for SE signal detecting | * VPSE: Variable pressure (VP) light detector for SE signal detecting | ||
* aSTEM: Retractable solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging | * aSTEM: Retractable solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging | ||
<b>Dramatically improved performance on insulating samples achieved via two pathways:</b> | <b>Dramatically improved performance on insulating samples achieved via two pathways:</b> | ||
| Line 27: | Line 29: | ||
* Standard variable pressure (VP) | * Standard variable pressure (VP) | ||
* NanoVP: A retractable differential pumping aperture mounted on the column makes it possible to use the In-lens SE and ESB detectors in VP mode | * NanoVP: A retractable differential pumping aperture mounted on the column makes it possible to use the In-lens SE and ESB detectors in VP mode | ||
<b>Other features:</b> | <b>Other features:</b> | ||