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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions

Bghe (talk | contribs)
Bghe (talk | contribs)
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|Electromagnetic coils (EM) 'outer coil'/'inner coil'
|Electromagnetic coils (EM) 'outer coil' / 'inner coil'
|'0-10'A/'0-30'A
|'0-10 A' / '0-30 A'


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