Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions
Appearance
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|Electromagnetic coils (EM) 'outer coil'/'inner coil' | |Electromagnetic coils (EM) 'outer coil' / 'inner coil' | ||
|'0-10' | |'0-10 A' / '0-30 A' | ||
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