Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions
Appearance
| Line 97: | Line 97: | ||
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|Electromagnetic coils 'outer coil'/'inner coil' | |Electromagnetic coils (EM) 'outer coil'/'inner coil' | ||
|'0-10'A/'0-30'A | |'0-10'A/'0-30'A | ||