Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions
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<gallery> | <gallery caption="EM tests" perrow="3" widths="400px" heights="300px"> | ||
File:Contour Plot Y15 EM_0_0.JPG | File:Contour Plot Y15 EM_0_0.JPG | ||
File:Contour Plot Y16 EM_10_30.JPG | File:Contour Plot Y16 EM_10_30.JPG | ||
File:Contour Plot Y27 EM_10_0.JPG | |||
File:Contour Plot Y26 EM_0_30.JPG | File:Contour Plot Y26 EM_0_30.JPG | ||
File:Contour Plot Y29 EM_2_30.JPG | File:Contour Plot Y29 EM_2_30.JPG | ||
File:Contour Plot patterned wafer EM_2_30.JPG | |||
</gallery> | </gallery> | ||