Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions
| Line 58: | Line 58: | ||
</gallery> | </gallery> | ||
==Testing with electromagnetic coils== | ==Testing with electromagnetic coils== | ||
| Line 97: | Line 98: | ||
|- | |- | ||
|} | |} | ||
<gallery> | |||
File:Contour Plot patterned wafer EM_2_30.JPG | |||
File:Contour Plot Y15 EM_0_0.JPG | |||
File:Contour Plot Y16 EM_10_30.JPG | |||
File:Contour Plot Y26 EM_0_30.JPG | |||
File:Contour Plot Y27 EM_10_0.JPG | |||
File:Contour Plot Y29 EM_2_30.JPG | |||
</gallery> | |||