Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
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The Chromium etch was carried out on the following substrate stack: | The Chromium etch was carried out on the following substrate stack: | ||
2" Si wafer with Cr laying in a 6" Si wafer with a 4" recess. The area outside the recess was covered by AZ resist. | 2" Si wafer with Cr laying in a 6" Si wafer with a 4" recess. The area outside the recess was covered by AZ resist. | ||
The work was carried out | The work was carried out by Erol Zekovic @Nanotech and BGHE@nanolab | ||
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | ||
|+ '''Cr etch''' | |+ '''Cr etch''' | ||