Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| Line 82: | Line 82: | ||
|- | |- | ||
!style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | !style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | ||
( | (Check image below) | ||
|style="background:Silver; color:black"|At 1200 <sup>o</sup>C | |style="background:Silver; color:black"|At 1200 <sup>o</sup>C | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||