Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*Max. 2000 SCCM | *Max. 2000 SCCM | ||
|style="background:WhiteSmoke; color:black;" align="left"| | |style="background:WhiteSmoke; color:black;" align="left"|Limited use. | ||
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|style="background:Silver; color:black"|NH<sub>3 | |style="background:Silver; color:black"|NH<sub>3 | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*Max. 2000 SCCM | *Max. 2000 SCCM | ||
|style="background:WhiteSmoke; color:black;" align="left"|'''Not tested'''. No recipes available. | |style="background:WhiteSmoke; color:black;" align="left"|'''Not connected and not tested'''. No recipes available. | ||
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|style="background:Silver; color:black"|5% H<sub>2</sub>/Ar | |style="background:Silver; color:black"|5% H<sub>2</sub>/Ar | ||