Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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|style="background:WhiteSmoke; color:black;" align="left"| Chamber maximum power is '''56 kW''' | |style="background:WhiteSmoke; color:black;" align="left"| '''Power control is NOT ALLOWED for more than 10s.''' Chamber maximum power is '''56 kW'''. | ||
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!style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | !style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | ||