Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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|style="background:Silver; color:black"|Pyro Control | |style="background:Silver; color:black"|Pyro Control | ||
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* | * 700 <sup>o</sup>C to 1200 <sup>o</sup>C | ||
|style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | |style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | ||
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