Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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=sand box =
{{#sub:This is a string.|0|4}}
{{Birth date and age|1993|Feb|24}} returns "February 24, 1993 (age 29)"
{{Birth date and age|1993|Feb|24|df=yes}} returns "24 February 1993 (age 29)"
{{Birth date and age|1993|Feb|24|mf=yes}} returns "February 24, 1993 (age 29)"
<reverse>abc<reverse>
<reverse string="abc" />

Latest revision as of 12:30, 28 June 2023

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Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7 - 10 10 0 80 0 0 150 3 1
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