Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Some questions and answers == | == Some questions and answers == | ||
This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share useful information instead of keeping it hidden deep in email correspondence. | This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share valuable and useful information (instead of keeping it hidden deep in email correspondence). | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware|Hardware and setup]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware|Hardware and setup]] | ||
Revision as of 10:07, 25 February 2011
This page is under construction
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.
Some questions and answers
This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share valuable and useful information (instead of keeping it hidden deep in email correspondence).