Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

Revision as of 09:58, 25 February 2011

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.

This section contains material from email correspondence with SPTS.

Revision as of 13:28, 24 February 2011 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →Some questions and answers ← Older edit		Revision as of 09:58, 25 February 2011 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →Some questions and answers Newer edit →
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]

			*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Masks\|Mask materials]]