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'''Theoretical part'''
'''Theoretical part'''
The location of the lectures will be notified in the Doodles
 
The locations for the lectures will be notified in the Doodles


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===Material for preparations and further information===
==Presentations from the lectures==
 
 
 
 
====Presentations from the lectures====


<big>Slides from the 1<sup>st</sup> lecture</big>
<big>Slides from the 1<sup>st</sup> lecture</big>
* See LabManager (required login)
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->


<big>Slides from the 2<sup>nd</sup> lecture</big>
<big>Slides from the 2<sup>nd</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]. <i>Notice that the presentation is divided into two parts</i>
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->


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*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]


====Thermal Oxidation====
====Thermal oxidation====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]