Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation E1 furnace: Difference between revisions
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<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> | <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> | ||
An acceptance test has been done after the installation in November 2021 by Tempress. For wet oxidation at 1050 C and 30 minutes, the thickness variation over a wafer was 1.3%(wafer in wafer), over the boat was 0.35%(wafer to wafer) and ran to ran was 0.64%. | |||
[[File:Wet1050_Acceptance_test.PNG|1100x1100px|center|thumb|Acceptance test by Tempress from November 2021.]] | [[File:Wet1050_Acceptance_test.PNG|1100x1100px|center|thumb|Acceptance test by Tempress from November 2021.]] | ||
Revision as of 13:01, 15 June 2023
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Unless otherwise stated, this page is written by DTU Nanolab internal
An acceptance test has been done after the installation in November 2021 by Tempress. For wet oxidation at 1050 C and 30 minutes, the thickness variation over a wafer was 1.3%(wafer in wafer), over the boat was 0.35%(wafer to wafer) and ran to ran was 0.64%.
