Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions
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''This page is written by DTU Nanolab internal'' | ''This page is written by DTU Nanolab internal'' | ||
==<span style="color:Red">EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the Particle Scanner Takano that can be used instead.</span>== | ==<span style="color:Red">EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the [Specific Process Knowledge/Characterization/Particle Scanner Takano|Particle Scanner Takano] that can be used instead.</span>== | ||
== KLA-Tencor Surfscan 6420 == | == KLA-Tencor Surfscan 6420 == | ||