Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions
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| Substrates get heated during the deposition. | | Substrates get heated during the deposition. | ||
For 100 nm Nb at 2 Å/s, the substrate reached about 105 °C. | For 100 nm Nb at 2 Å/s, the substrate reached about 105 °C. | ||
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