Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Some questions and answers == | == Some questions and answers == | ||
This section contains material from email correspondence with SPTS. | |||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware|Hardware and setup]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware|Hardware and setup]] | ||
Revision as of 13:26, 24 February 2011
This page is under construction
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.
Some questions and answers
This section contains material from email correspondence with SPTS.