Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further. | The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further. | ||
== Some questions and answers == | |||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware|Hardware and setup]] | |||