LabAdviser/Courses/TPT Thin Film: Difference between revisions
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====Literature==== | ====Literature==== | ||
Some litterature can be found in the LabManager (required a login): | |||
* S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes | |||
* S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes | |||
* M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties | |||
* K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Film | |||