Specific Process Knowledge/Characterization/XRD: Difference between revisions
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| Crystal structure analysis and thin film thickness measurement | |style="background:LightGrey; color:black"| Crystal structure analysis | ||
and thin film thickness measurement | |||
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*Phase ID | *Phase ID | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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All materials approved in the cleanroom. No powders or dusty materials. | All materials approved in the cleanroom. | ||
No powders or dusty materials. | |||
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All materials have to be approved | All materials have to be approved | ||