LabAdviser/Courses/TPT Thin Film: Difference between revisions
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*Introduction to thin films | *Introduction to thin films | ||
*Before you start - Material properties to consider | *Before you start - Material properties to consider | ||
*Overview of thin film techniques at DTU Nanolab | |||
*Equipment overview in LabAdviser | *Equipment overview in LabAdviser | ||
*Thin | *Thin film techniques – 1<sup>st</sup> part: | ||
**Thermal oxidation | **Thermal oxidation | ||
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'''2<sup>nd</sup> lecture (3 - 3½ hours):''' | '''2<sup>nd</sup> lecture (3 - 3½ hours):''' | ||
* | *Thin film techniques – 2<sup>nd</sup> part: | ||
**PVD (physical vapour deposition) | |||
*PVD (physical vapour deposition) | ***E-beam evaporation | ||
**E-beam evaporation | ***Thermal evaporation | ||
**Thermal evaporation | ***Sputtering | ||
**Sputtering | **CVD (chemical vapour depostion) | ||
*CVD (chemical vapour depostion) | ***LPCVD (low pressure chemical vapour deposition) | ||
**LPCVD (low pressure chemical vapour deposition) | ***PECVD (plasma enhanced chemical vapour deposition) | ||
**PECVD (plasma enhanced chemical vapour deposition) | **ALD (atomic layer deposition) | ||
*ALD (atomic layer deposition) | |||
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf | <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf | ||
The next | The next lecture will be held on the 15th of June from 9:00 to 12:00. | ||
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||