Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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It is usually a good idea to deal with substrate rotation first. Move the stage to the center of your substrate. Use the coordinate guide posted on the wall next to the prealigner and the coordinate read out on the table. Once you find the center of your substrate move to a horisontal feature like a cross or waveguide that will allow rotation adjustment. In the example below we have a cross (the P mark) which is obviously rotated relative to the red cross hair. | It is usually a good idea to deal with substrate rotation first. Move the stage to the center of your substrate. Use the coordinate guide posted on the wall next to the prealigner and the coordinate read out on the table. Once you find the center of your substrate move to a horisontal feature like a cross or waveguide that will allow rotation adjustment. In the example below we have a cross (the P mark) which is obviously rotated relative to the red cross hair. | ||
If the cassette has a slot rotation screw, use this to roughly correct rotation. If the slot does not have a rotation screw, remove the substrate cover and rotate your substrate. The rotation screw is fragile, NEVER USE A TOOL TO ROTATE IT. Only use your fingers. The slot is spring loaded, if it is hard to turn the screw you can release tension in the springs by firmly presseing down on the outer ring as illustrated below. | If the cassette has a slot rotation screw, use this to roughly correct rotation. If the slot does not have a rotation screw, remove the substrate cover and rotate your substrate. The rotation screw is fragile, NEVER USE A TOOL TO ROTATE IT. Only use your fingers. The slot is spring loaded, if it is hard to turn the screw you can release tension in the springs by firmly presseing down on the outer ring as illustrated below. | ||