Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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| Line 43: | Line 43: | ||
PATH FT01 | PATH FT01 | ||
ARRAY (-15000,2,30000)/(10000,2,20000) | ARRAY (-15000,2,30000)/(10000,2,20000) | ||
ASSIGN A(1) -> (( | ASSIGN A(1) -> ((*,*)) | ||
1: ARRAY (-4000,5,2000)/(4000,5,2000) | 1: ARRAY (-4000,5,2000)/(4000,5,2000) | ||