Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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Illustration of wafer scale pattern alignment and chip array alignment for two designs, L1 and L2. | Illustration of wafer scale pattern alignment and chip array alignment for two designs, L1 and L2. The goal is to align the L2 pattern to the L1 pattern. | ||
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