Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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= DRIE-Pegasus 2= | = DRIE-Pegasus 2= | ||
{{Author-jmli1}} | {{Author-jmli1}} | ||
[[File:Pegasus 2 operator.jpg|right|400px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}]] | |||
[[File:Pegasus 2 operator.jpg| | |||
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager:''' | '''The user manual(s), user APV(s), technical information and contact information can be found in LabManager:''' | ||