Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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: 2020 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 38(5), [053002] | : 2020 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 38(5), [053002] | ||
: https://doi.org/10.1116/6.0000357 | : https://doi.org/10.1116/6.0000357 | ||
; Vy Thi Hoang Nguyen et al.: Cr and CrO<sub>x</sub> etching using SF<sub>6</sub> and O2 plasma | |||
: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201] | |||
: https://doi.org/10.1116/6.0000922 | |||
== Process information == | == Process information == | ||