Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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: https://doi.org/10.1016/j.mee.2018.01.034 | : https://doi.org/10.1016/j.mee.2018.01.034 | ||
; Bingdong Chang et al.: DREM2: | ; Bingdong Chang et al.: DREM2: A facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process | ||
: 2018 J. Micromech. Microeng. 28 105012 | : 2018 J. Micromech. Microeng. 28 105012 | ||
: https://doi.org/10.1088/1361-6439/aad0c4 | : https://doi.org/10.1088/1361-6439/aad0c4 | ||