Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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= DRIE-Pegasus 2= | = DRIE-Pegasus 2= | ||
{{Author-jmli1}} | |||
[[Image:Pegasus 2 operator.jpg |frame|x400px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]] | [[Image:Pegasus 2 operator.jpg |frame|x400px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]] | ||