Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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: 2020, Microelectronic Engineering, Volume 223, 15 February, 111228 | : 2020, Microelectronic Engineering, Volume 223, 15 February, 111228 | ||
: https://doi.org/10.1016/j.mee.2020.111228 | : https://doi.org/10.1016/j.mee.2020.111228 | ||