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Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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: 2020, Microelectronic Engineering, Volume 223, 15 February, 111228
: 2020, Microelectronic Engineering, Volume 223, 15 February, 111228
: https://doi.org/10.1016/j.mee.2020.111228
: https://doi.org/10.1016/j.mee.2020.111228
*[[Media:Grassfree1.pdf  ]]
*[[Media:3DnanoSi.pdf  ]]
*[[Media:CORE1.pdf  ]]
*[[Media:DREM1.pdf ]]