Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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'''CHMPOS [M1=(x1,y1){,M2=(x2,y2),M3=(x3,y3),M4=(x4,y4)}]''' | |||
'''CHMPOS''' defines the chip alignment marks in the local chip coordinate system, unit is µm. M1 is mandatory while M2-M4 are optional in one mark mode. In four mark mode all marks must be defined. The order of the marks is important, M1 must be top left with M2-M4 placed clockwise around the center. In the given example the four marks are placed symmetrically at ±450 µm in x and ±450 µm in y. | |||