Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
| Line 333: | Line 333: | ||
MAGAZIN 'THOPE' | MAGAZIN 'THOPE' | ||
#8 | #8 | ||
%4C | %4C | ||
JDF ' | JDF 'thope230126',1 | ||
ACC 100 | ACC 100 | ||
CALPRM '6na_ap5' | CALPRM '6na_ap5' | ||
| Line 347: | Line 345: | ||
SHOT A,6 | SHOT A,6 | ||
OFFSET(-44,-139) | OFFSET(-44,-139) | ||
END 8 | END 8 | ||