Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 325: Line 325:
|-  
|-  
| colspan="1" style="text-align:center;|
| colspan="1" style="text-align:center;|
Illustration of chip alignment using a chip array instanced into another array.
Illustration of chip alignment using a chip array instanced into another array. Notice in the right most illustration how four corner marks are used to force symmetry around (0,0) such that the pattern is placed correctly.
|}
|}