Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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==Chip alignment== | ==Chip alignment== | ||
Chip alignment requires a global alignment to be made first to establish the wafer coordinate system. | Chip alignment requires a global alignment to be made first to establish the wafer coordinate system. Hence a global alignment using '''GLMDET''' is used initially as in the example above. To further illustrate chip alignment we will look at a particular layout shown below. The layout also illustrates a commonly used feature on the JEOL system to create arrays of arrays. In the layout below there is main 2x2 array and into each of these is a 5x5 subarray. Each element of the subarray is a single chip with four chip alignment marks. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||