Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 275: Line 275:
PATH DRF5M
PATH DRF5M
   ARRAY (0,1,0)/(0,1,0) ;
   ARRAY (0,1,0)/(0,1,0) ;
ASSIGN P(1) -> ((*,*),MOD001) ;
ASSIGN P(1) -> (*,*) ;
   AEND
   AEND
PEND
PEND