Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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| Line 275: | Line 275: | ||
PATH DRF5M | PATH DRF5M | ||
ARRAY (0,1,0)/(0,1,0) ; | ARRAY (0,1,0)/(0,1,0) ; | ||
ASSIGN P(1) -> | ASSIGN P(1) -> (*,*) ; | ||
AEND | AEND | ||
PEND | PEND | ||