Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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*M - for manual alignment | *M - for manual alignment | ||
*C - for cancel, i.e. no alignment | *C - for cancel, i.e. no alignment | ||
In automatic mode the system will execute the SETWFR subprogram to find the global alignment marks (P and Q) by beam scans. SETWFR will execute mark detection at the P and Q mark locations defined in the JDF file. at their designated locations by beam scans as set up in the SETWFR subprogram. | |||
==Global alignment - JDF== | ==Global alignment - JDF== | ||