Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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*S - for semiautomatic alignment | *S - for semiautomatic alignment | ||
*M - for manual alignment | *M - for manual alignment | ||
* | *C - for cancel, i.e. no alignment | ||
==Global alignment - JDF== | ==Global alignment - JDF== | ||