Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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Compared to the first print exposure the SDF file has three extra commands, '''GLMDET''', '''CHIPAL''' and '''HSWITCH'''. Additionally, the '''OFFSET''' command serves a somewhat different purpose now as explained below. | Compared to the first print exposure the SDF file has three extra commands, '''GLMDET''', '''CHIPAL''' and '''HSWITCH'''. Additionally, the '''OFFSET''' command serves a somewhat different purpose now as explained below. | ||
'''GLMDET [mode]''' | |||
GLMDET (GLobal Mark DETect) has four modes | |||
*A - for automatic alignment | |||
*S - for semiautomatic alignment | |||
*M - for manual alignment | |||
*0 - for no alignment | |||
==Global alignment - JDF== | ==Global alignment - JDF== | ||