Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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=Scanning Electron Microscopy at Nanolab= | =Scanning Electron Microscopy at Nanolab= | ||
There is a large range of scanning electron microscopes (SEMs) at DTU Nanolab. The first couple of sections on this page are about the SEMs in and around the fabrication part of Nanolab in building 346 and 451. The | There is a large range of scanning electron microscopes (SEMs) at DTU Nanolab. The first couple of sections on this page are about the SEMs in and around the fabrication part of Nanolab in building 346 and 451. The last section is about the SEMs in building 314, which is our dedicated characterization facility. | ||
== Scanning electron microscopy in and around the cleanroom== | == Scanning electron microscopy in and around the cleanroom== | ||