Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
| Line 4: | Line 4: | ||
''This page is written by DTU Nanolab internal'' | ''This page is written by DTU Nanolab internal'' | ||
== Scanning electron microscopy in the cleanroom | =Scanning Electron Microscopy at Nanolab= | ||
There is a large range of scanning electron microscopes (SEMs) at DTU Nanolab. The first couple of sections on this page are about the SEMs in and around the fabrication part of Nanolab in building 346 and 451. The next section is about the SEMs in building 314, which is our dedicated characterization facility. | |||
== Scanning electron microscopy in and around the cleanroom== | |||
{{Template:ContentbySEMresponsibles}} | {{Template:ContentbySEMresponsibles}} | ||
The four SEMs in building 346 and 451 cover a wide range of needs both in the cleanroom and outside: From fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to ultra high resolution images on any type of sample intended for publication. | |||
* The [[Specific_Process_Knowledge/Characterization/SEM_Supra_1|SEM Supra 1]] is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom. | * The [[Specific_Process_Knowledge/Characterization/SEM_Supra_1|SEM Supra 1]] is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom. | ||
* The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] and [[Specific_Process_Knowledge/Characterization/SEM_Supra_3|SEM Supra 3]] are located in the cleanroom where they serve as general imaging tools for samples that have been fabricated in the cleanroom. Like SEM Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] is also equipped with an airlock and an EDX detector. | * The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] and [[Specific_Process_Knowledge/Characterization/SEM_Supra_3|SEM Supra 3]] are located in the cleanroom where they serve as general imaging tools for samples that have been fabricated in the cleanroom. Like SEM Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] is also equipped with an airlock and an EDX detector. | ||
* The [[Specific_Process_Knowledge/Characterization/SEM_Tabletop_1|SEM Tabletop 1]] is a tabletop SEM that is located in the basement outside the cleanroom. It has a limited resolution, but it is fast and easy to use, also for non-conducting samples. Training in the others SEMs is not required to use this SEM. | * The [[Specific_Process_Knowledge/Characterization/SEM_Tabletop_1|SEM Tabletop 1]] is a tabletop SEM that is located in the basement outside the cleanroom. It has a limited resolution, but it is fast and easy to use, also for non-conducting samples. Training in the others SEMs is not required to use this SEM. | ||
SEM Supra 1, 2 and 3 | SEM Supra 1, 2 and 3 are all manufactured by Carl Zeiss and have the same graphical user interface and nearly identical electron optics. But there are there are small hardware and software differences, thus a training is needed for each SEM you want to use. | ||
The SEM Tabletop 1 is manufactured by Hitachi. | The SEM Tabletop 1 is manufactured by Hitachi. | ||