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| ==Global alignment - jobdeck file== | | ==Global alignment - jobdeck file== |
| <pre> | | <pre> |
| JOB/W 'ELELOP',4 ; 4inch wafer | | JOB/W 'ELELOP',4 |
| | |
| GLMPOS P =(-36000,0), Q=(36000,0) ; Position of the alignment Global Marks, give the coordinates of their position first the left one (P) and then the right one (Q)
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| GLMP 2, 450,0,0 ; Type of mark it is looking for. The information is given by the line width, and the leg length and 0,0 in case of using a cross that is not rotated
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|
| |
|
| | GLMPOS P =(-36000,0), Q=(36000,0) |
| | GLMP 2, 450,0,0 |
|
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| PATH DRF5M | | PATH DRF5M |
| Line 268: |
Line 267: |
| PEND | | PEND |
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| |
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| LAYER 1 | | LAYER 1 |
|
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| P(1) 'elelop_GIST_L2.v30' | | P(1) 'elelop_GIST_L2.v30' |
|
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| SPPRM 4.0,,,,1.0,1 | | SPPRM 4.0,,,,1.0,1 |
| STDCUR 6.6 ; x nA + 10% ; CHANGE | | STDCUR 6.6 |
| OBJAPT 5 | | OBJAPT 5 |
|
| | |
| MOD001: MODULAT (( 0, -1.0 ) , ( 1, 0.0 ) , ( 2, 1.0 )
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| - , ( 3, 2.0 ) , ( 4, 3.0 ) , ( 5, 4.1 )
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| - , ( 6, 5.1 ) , ( 7, 6.2 ) , ( 8, 7.2 )
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| - , ( 9, 8.3 ) , ( 10, 9.4 ) , ( 11, 10.5 )
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| - , ( 12, 11.6 ) , ( 13, 12.7 ) , ( 14, 13.8 )
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| - , ( 15, 14.9 ) , ( 16, 16.1 ) , ( 17, 17.3 )
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| - , ( 18, 18.4 ) , ( 19, 19.6 ) , ( 20, 20.8 )
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| - , ( 21, 22.0 ) , ( 22, 23.2 ) , ( 23, 24.5 )
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| - , ( 24, 25.7 ) , ( 25, 27.0 ) , ( 26, 28.2 )
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| - , ( 27, 29.5 ) , ( 28, 30.8 ) , ( 29, 32.1 )
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| - , ( 30, 33.5 ) , ( 31, 34.8 ) , ( 32, 36.1 )
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| - , ( 33, 37.5 ) , ( 34, 38.9 ) , ( 35, 40.3 )
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| - , ( 36, 41.7 ) , ( 37, 43.1 ) , ( 38, 44.5 )
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| - , ( 39, 46.0 ) , ( 40, 47.4 ) , ( 41, 48.9 )
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| - , ( 42, 50.4 ) , ( 43, 51.9 ) , ( 44, 53.4 )
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| - , ( 45, 54.9 ) , ( 46, 56.5 ) , ( 47, 58.1 )
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| - , ( 48, 59.6 ) , ( 49, 61.2 ) , ( 50, 62.8 )
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| - , ( 51, 64.5 ) , ( 52, 66.1 ) , ( 53, 67.8 )
| |
| - , ( 54, 69.4 ))
| |
| | |
| ; JDI file values for PEC
| |
| | |
| END | | END |
| </pre> | | </pre> |
