Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 84: Line 84:
|-  
|-  
| colspan="1" style="text-align:center;|
| colspan="1" style="text-align:center;|
Illustration of SEM mode and alignment and beam scan alignment.
Illustration of SEM mode alignment and beam scan alignment.
|}
|}