Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
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This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. | This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. | ||
Users are NOT allowed to change the path definition file on the system. | |||
<div class="center" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Users are NOT allowed to change the path definition file on the system.'''</div> | |||
<pre> | <pre> | ||